Simultaneous thickness and surface profiling of blank mask and its experimental verification using robust harmonic fringe-iterative algorithm and Fizeau interferometer
Sung‐Tae Kim, Yangjin Kim, Kenichi Hibino, Naohiko Sugita, Mamoru Mitsuishi
Topics & Concepts
Fizeau interferometerBlankOpticsInterferometryIterative methodHarmonicsNonlinear systemHarmonicFourier transformComputer scienceMaterials scienceAlgorithmAstronomical interferometerPhysicsAcousticsVoltageQuantum mechanicsComposite materialOptical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesAdvanced Surface Polishing Techniques