Electrostatic self-assembly design of core@shell structured Al2O3@C nanospheres towards high-efficiency and damage-free polishing sapphire wafer
Mengdi Zhang, Wei Zhou, Hanqing Xu
Topics & Concepts
Materials scienceAmorphous carbonComposite materialComposite numberSapphireAbrasiveCarbon fibersWaferAmorphous solidNanocompositeSurface roughnessShell (structure)PolishingX-ray photoelectron spectroscopyChemical-mechanical planarizationCarbonizationRaman spectroscopyNanotechnologyChemical engineeringScanning electron microscopeOpticsCrystallographyChemistryLaserEngineeringPhysicsAdvanced ceramic materials synthesisDiamond and Carbon-based Materials ResearchZnO doping and properties