Litcius/Paper detail

High-precision moiré alignment method using centrosymmetric grating for 3D interlayer interconnect

Feifan Xu, Songtao Chang, Yulu Zhao, Weishi Li, Haojie Xia

2023Optics and Lasers in Engineering16 citationsDOI

Topics & Concepts

GratingMoiré patternInterconnectionOpticsMaterials scienceFabricationComputer scienceElectronic circuitOptoelectronicsPhysicsQuantum mechanicsAlternative medicinePathologyMedicineComputer networkOptical measurement and interference techniquesAdvanced Measurement and Metrology TechniquesOptical Coatings and Gratings
High-precision moiré alignment method using centrosymmetric grating for 3D interlayer interconnect | Litcius