A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor
Lue Quan, Yuki Shimizu, Xin Xiong, Hiraku Matsukuma, Wei Gao
Topics & Concepts
OpticsDiffractionRotary encoderStandard deviationGratingFizeau interferometerScale (ratio)PhysicsInterferometryMinimum deviationMeasure (data warehouse)LaserDiffraction gratingEncoderAcousticsComputer scienceMathematicsAstronomical interferometerStatisticsDatabaseQuantum mechanicsAdvanced Measurement and Metrology TechniquesOptical measurement and interference techniquesSurface Roughness and Optical Measurements