Short-pulse high-power dual magnetron sputtering
В.О. Оскирко, А. Н. Захаров, V. A. Semenov, А.П. Павлов, A.S. Grenadyorov, С. В. Работкин, А.А. Solovyev
Topics & Concepts
Pulse durationSputter depositionCavity magnetronMaterials sciencePulse (music)IonHigh-power impulse magnetron sputteringPower densityIon currentAmplitudeOptoelectronicsCurrent densitySputteringDeposition (geology)Substrate (aquarium)Atomic physicsAnalytical Chemistry (journal)Power (physics)ChemistryOpticsThin filmLaserPhysicsNanotechnologyOceanographyPaleontologyOrganic chemistrySedimentBiologyChromatographyDetectorGeologyQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices