Litho-NeuralODE 2.0: Improving hotspot detection accuracy with advanced data augmentation, DCT-based features, and neural ordinary differential equations
Qing Zhang, Yuhang Zhang, Jizuo Li, Wei Lu, Yongfu Li
Topics & Concepts
Discrete cosine transformArtificial neural networkComputer scienceArtificial intelligenceHotspot (geology)Pattern recognition (psychology)Feature extractionAlgorithmData miningImage (mathematics)GeologyGeophysicsAdvancements in Photolithography TechniquesIndustrial Vision Systems and Defect DetectionImage and Object Detection Techniques