An adjustable Ar ion-beam activation strategy to achieve hydrophilic bonding of Si and diamond by deposited AlN interlayer
Kechen Zhao, Jiwen Zhao, Xiaoyu Guan, Wenxin Cao, Jiecai Han, Bing Dai, Jiaqi Zhu
Topics & Concepts
Materials scienceDiamondThermal conductivityOptoelectronicsChemical vapor depositionIon beamNitrideSubstrate (aquarium)Layer (electronics)FabricationNanotechnologyComposite materialIonChemistryAlternative medicinePathologyMedicineOceanographyGeologyOrganic chemistryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsSemiconductor materials and devices