Growth of Al-rich AlGaN thin films by purely thermal atomic layer deposition
Seok Cheol Choi, Abu Saad Ansari, Hee Ju Yun, Hogyoung Kim, Bonggeun Shong, Byung Joon Choi
Topics & Concepts
TriethylgalliumMaterials scienceAtomic layer depositionLayer (electronics)Thin filmDielectricAnalytical Chemistry (journal)Deposition (geology)SapphireAmmoniaChemical compositionNanotechnologyMetalorganic vapour phase epitaxyOptoelectronicsChemistryEpitaxySedimentPaleontologyBiologyOrganic chemistryChromatographyOpticsLaserPhysicsGaN-based semiconductor devices and materialsSemiconductor materials and devicesGa2O3 and related materials