Heteroepitaxial Growth of an Ultrathin β-Ga<sub>2</sub>O<sub>3</sub> Film on a Sapphire Substrate Using Mist CVD with Fluid Flow Modeling
Abhay Kumar Mondal, Revathy Deivasigamani, Loh Kean Ping, Muhammad Aniq Shazni Mohammad Haniff, Boon Tong Goh, Ray‐Hua Horng, Mohd Ambri Mohamed
Abstract
in an ultrathin film with a band gap of 4.8 eV.
Topics & Concepts
MistSapphireMaterials scienceSubstrate (aquarium)Flow (mathematics)OptoelectronicsOpticsMechanicsPhysicsGeologyLaserMeteorologyOceanographyGa2O3 and related materialsAdvanced Photocatalysis TechniquesZnO doping and properties