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Fabrication of oxide-free dimple structure on germanium via electrochemical jet machining enhanced by opposing laser irradiation

Hao Zhu, Zixuan Jiang, Jincai Han, Viboon Saetang, Kun Xu, Yang Liu, Zhaoyang Zhang, Shu Huang, Jianzhong Zhou

2022Journal of Manufacturing Processes15 citationsDOI

Topics & Concepts

Materials scienceDimpleElectrolyteWaferFabricationElectrochemical machiningMachiningPerpendicularComposite materialOptoelectronicsOpticsNanotechnologyMetallurgyElectrodeMathematicsPhysicsGeometryPathologyAlternative medicinePhysical chemistryMedicineChemistryLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization Techniques
Fabrication of oxide-free dimple structure on germanium via electrochemical jet machining enhanced by opposing laser irradiation | Litcius