Characteristics of thickness-vibration-mode PZT transducer for acoustic micropumps
Hao Yun, Deqing Kong, Manabu Aoyagi
Topics & Concepts
TransducerMicropumpMaterials scienceAcousticsPressure sensorVoltageVibrationTube (container)PiezoelectricityVolumetric flow rateEngineeringElectrical engineeringComposite materialMechanical engineeringMechanicsPhysicsNanotechnologyMicrofluidic and Capillary Electrophoresis ApplicationsMicrofluidic and Bio-sensing TechnologiesAcoustic Wave Resonator Technologies