Microstructure and residual stress dependence of molybdenum films on DC magnetron sputtering conditions
Nisar Ahmed, Zuhair S. Khan, Asghar Ali
Topics & Concepts
Materials scienceSputteringMicrostructureComposite materialSputter depositionThin filmResidual stressScanning electron microscopeUltimate tensile strengthCrystallinityMolybdenumMetallurgyNanotechnologyMetal and Thin Film MechanicsSemiconductor materials and interfacesCopper Interconnects and Reliability