Modulation of the chemical mechanical polishing performance of core-shell SnO2@CeO2 abrasives via the shape change
Ruiting Zheng, Jingwei Zhu, Liangmao Jin, Zhiqiang Cao, Chong Zhang, Gaorong Han, Yong Liu
Topics & Concepts
PolishingMaterials scienceChemical-mechanical planarizationModulation (music)Core (optical fiber)Shell (structure)MetallurgyComposite materialNanotechnologyPhysicsAcousticsAdvanced Surface Polishing TechniquesAdvanced materials and compositesDiamond and Carbon-based Materials Research