Modification of a-C:H films via nitrogen and silicon doping: The way to the superlubricity in moisture atmosphere
Kai Wang, Baoping Yang, Bin Zhang, Changning Bai, Zhixing Mou, Kaixiong Gao, G. Yu. Yushkov, Е. М. Oks
Topics & Concepts
Materials scienceSiliconX-ray photoelectron spectroscopyCarbon fibersChemical vapor depositionHigh-resolution transmission electron microscopyDopingDangling bondPlasma-enhanced chemical vapor depositionRaman spectroscopyChemical engineeringAtmosphere (unit)Carbon filmComposite materialNanotechnologyThin filmComposite numberMetallurgyOpticsOptoelectronicsTransmission electron microscopyThermodynamicsPhysicsEngineeringDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsBoron and Carbon Nanomaterials Research