Process exploration of β-Ga2O3 blind hole processing by water-assisted femtosecond laser technology
Kun Zhang, Zongwei Xu, Bing Dong, Shengnan Zhang
Topics & Concepts
Materials scienceLaserFemtosecondSurface micromachiningOptoelectronicsMachiningUltravioletOpticsPulse durationLaser beam machiningFabricationLaser beamsMetallurgyPathologyPhysicsMedicineAlternative medicineGa2O3 and related materialsElectronic and Structural Properties of OxidesSemiconductor materials and devices