Atomic layer deposition of palladium thin film from palladium (II) hexafluoroacetylacetonate and ozone reactant
Yiming Zou, Jiahui Li, Chunyu Cheng, Zhiwei Wang, Amanda Jiamin Ong, Ronn Goei, Xianglin Li, Shuzhou Li, Alfred Iing Yoong Tok
Topics & Concepts
PalladiumSiliconMaterials scienceAtomic layer depositionThin filmLayer (electronics)MetalChemical engineeringDeposition (geology)SapphirePlatinumInorganic chemistryAnalytical Chemistry (journal)CatalysisChemistryNanotechnologyMetallurgyOrganic chemistryOpticsSedimentPhysicsBiologyEngineeringPaleontologyLaserSemiconductor materials and devicesCatalytic Processes in Materials ScienceElectronic and Structural Properties of Oxides