A Navigation-Grade Mems Vibrating Beam Accelerometer
Guillermo Sobreviela-Falces, Milind Pandit, D. Young, Callisto Pili, James T. McIntosh, Julian Abbott, Guy Brook, Matthew Reed, Philipp Steinmann, Niall MacCarthy, Colin Baker, Ashwin A. Seshia
Abstract
This paper reports on a differential MEMS vibrating beam accelerometer (VBA) demonstrating excellent stability for inertial navigation applications (bias instability < 1μg), The accelerometer response demonstrates excellent linearity over an acceleration range of ±25 g (1 g = 9.8 m S <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−2</sup> ) with a scale factor of 1110 Hz/g. An in-run bias instability of 0.123 μg for a 10s integration time and a velocity random walk of 0.7μg/√Hz are recorded. The MEMS VBA has been extensively tested with measured results benchmarking favorably relative to current state-of-the-art navigation-grade MEMS accelerometers.