Litcius/Paper detail

Wafer map defect pattern classification based on convolutional neural network features and error-correcting output codes

Cheng Jin, Hyun-Jin Kim, Yongjun Piao, Meijing Li, Minghao Piao

2020Journal of Intelligent Manufacturing67 citationsDOI

Topics & Concepts

WaferPattern recognition (psychology)Convolutional neural networkArtificial intelligencePreprocessorComputer scienceArtificial neural networkData pre-processingMaterials scienceOptoelectronicsIndustrial Vision Systems and Defect DetectionAdvancements in Photolithography TechniquesImage Processing Techniques and Applications
Wafer map defect pattern classification based on convolutional neural network features and error-correcting output codes | Litcius