Wafer map defect pattern classification based on convolutional neural network features and error-correcting output codes
Cheng Jin, Hyun-Jin Kim, Yongjun Piao, Meijing Li, Minghao Piao
Topics & Concepts
WaferPattern recognition (psychology)Convolutional neural networkArtificial intelligencePreprocessorComputer scienceArtificial neural networkData pre-processingMaterials scienceOptoelectronicsIndustrial Vision Systems and Defect DetectionAdvancements in Photolithography TechniquesImage Processing Techniques and Applications