Traceable Lateral Force Calibration (TLFC) for Atomic Force Microscopy
Arnab Bhattacharjee, Nikolay Garabedian, Christopher L. Evans, David L. Burris
Topics & Concepts
CantileverCalibrationStiffnessLeverSpring (device)Materials scienceDeflection (physics)AcousticsNanotechnologyOpticsMechanical engineeringEngineeringPhysicsQuantum mechanicsComposite materialForce Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure AnalysisAdvanced MEMS and NEMS Technologies