An accuracy improving method for composite grating phase measuring profilometry
Haihua An, Yiping Cao, Hongmei Li, Chen Jin, Na Yang
Topics & Concepts
ProfilometerGratingOpticsWindow functionWindow (computing)Phase (matter)Computer scienceMean squared errorNoise (video)Root mean squareFilter (signal processing)AlgorithmMaterials scienceMathematicsComputer visionPhysicsImage (mathematics)Surface finishStatisticsQuantum mechanicsOperating systemComposite materialOptical measurement and interference techniquesOptical Systems and Laser TechnologyAdvanced Measurement and Metrology Techniques