A novel anti-corrosion strategy for ultra-high purity 316 L stainless steel in the semiconductor industry: Leveraging alternating voltage passivation and nitric acid passivation

Chaoran Ma, Zhice Yang, Peng Zhou, Yang Zhao, Yong Hua, Cheng Su, Tao Zhang, Fuhui Wang

2025Corrosion Science9 citationsDOI

Topics & Concepts

PassivationCorrosionNitric acidMaterials scienceSemiconductorMetallurgyVoltageOptoelectronicsComposite materialElectrical engineeringEngineeringLayer (electronics)Hydrogen embrittlement and corrosion behaviors in metalsCorrosion Behavior and InhibitionMetal and Thin Film Mechanics

A novel anti-corrosion strategy for ultra-high purity 316 L stainless steel in the semiconductor industry: Leveraging alternating voltage passivation and nitric acid passivation

Topics & Concepts

A novel anti-corrosion strategy for ultra-high purity 316 L stainless steel in the semiconductor industry: Leveraging alternating voltage passivation and nitric acid passivation