Threshold voltage tuning of IGZTO thin-film transistors deposited by RF sputtering for high-resolution flexible displays using deep ultraviolet light
In Pyo Park, Bu Kyeong Hwang, Bo Ram Lee, Pung Keun Song, Soo Won Heo
Abstract
Development of DUV/Thermal dual treatment (DTT) process to improve the electrical performance and stability of oxide thin film transistors while efficiently controlling the threshold voltage of the device.
Topics & Concepts
Materials scienceSputteringUltravioletOptoelectronicsTransistorThin-film transistorHigh resolutionThreshold voltageVoltageUltraviolet lightThin filmNanotechnologyElectrical engineeringRemote sensingLayer (electronics)GeologyEngineeringThin-Film Transistor TechnologiesTransition Metal Oxide NanomaterialsZnO doping and properties