A cost-effective approach for transitioning to larger wafer production by small Czochralski pullers
Yi‐Jen Huang, Yi‐Jen Huang, Amir Reza Ansari Dezfoli
Topics & Concepts
WaferIngotSiliconSemiconductorMaterials scienceEngineering physicsOptoelectronicsProduction (economics)Crystal growthMechanical engineeringNanotechnologyComputer scienceComposite materialEngineeringChemistryCrystallographyAlloyEconomicsMacroeconomicsSilicon and Solar Cell TechnologiesAdvanced Surface Polishing Techniques3D IC and TSV technologies