Effect of grinding damage on cutting force and ductile machining during single grain scratching of monocrystalline silicon
Ming Li, Xiaoguang Guo, Siyang Dai, Song Yuan, Jianli Ma, Fumin Liu, Lemin Zhang, Dongming Guo, Ping Zhou
Topics & Concepts
Materials scienceMonocrystalline siliconScratchingMachiningGrindingMetallurgySiliconComposite materialAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics