Study of deformation mechanism of structural anisotropy in 4H–SiC film by nanoindentation
Lianghao Xue, Gan Feng, Gai Wu, Fang Dong, Kang Liang, Rui Li, Shizhao Wang, Sheng Liu
Topics & Concepts
NanoindentationMaterials scienceIndentationDislocationDeformation (meteorology)Deformation mechanismNucleationAnisotropyComposite materialCrystallographyPlane (geometry)Condensed matter physicsMicrostructureGeometryOpticsPhysicsThermodynamicsMathematicsChemistryMetal and Thin Film MechanicsSilicon Carbide Semiconductor TechnologiesAdvanced ceramic materials synthesis