Sheet Resistance Measurements of Conductive Thin Films: A Comparison of Techniques
Mira Naftaly, Satyajit Das, John Gallop, Kewen Pan, Feras Alkhalil, Darshana Kariyapperuma, Sophie Constant, Catherine Ramsdale, Ling Hao
Abstract
Conductive thin films are an essential component of many electronic devices. Measuring their conductivity accurately is necessary for quality control and process monitoring. We compare conductivity measurements on films for flexible electronics using three different techniques: four-point probe, microwave resonator and terahertz time-domain spectroscopy. Multiple samples were examined, facilitating the comparison of the three techniques. Sheet resistance values at DC, microwave and terahertz frequencies were obtained and were found to be in close agreement.
Topics & Concepts
Sheet resistanceTerahertz radiationMaterials scienceConductivityElectrical conductorMicrowaveOptoelectronicsThin filmElectronicsResonatorSurface conductivityComposite materialElectrical engineeringNanotechnologyLayer (electronics)Computer scienceEngineeringTelecommunicationsPhysicsQuantum mechanicsPhotonic Crystals and ApplicationsPhotonic and Optical DevicesMicrowave and Dielectric Measurement Techniques