Deposition of DLC films on the inner wall of U-type pipes by hollow cathode PECVD
Xubing Wei, Pingmei Yin, Jian Wu, Xiangfan Nie, Zhibin Lu, Guangan Zhang
Topics & Concepts
Materials scienceTribologyPlasma-enhanced chemical vapor depositionCorrosionDiamond-like carbonComposite materialRaman spectroscopyDielectric spectroscopyMicrostructureMetallurgyThin filmSiliconElectrochemistryNanotechnologyOpticsChemistryPhysical chemistryElectrodePhysicsDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsLubricants and Their Additives