Comparative Study on the Influence of Reactive Gas Flow Rate on the Growth and Properties of P-doped TiAlN Coatings Prepared by DcMS and HiPIMS
Olayinka Oluwatosin Abegunde, M. Makha, Karima Machkih, Anas Ghailane, Hicham Larhlimi, Youssef Samih, Jones Alami
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceVolumetric flow rateCoatingRaman spectroscopySputter depositionSputteringAnalytical Chemistry (journal)Thin filmPhysical vapor depositionElastic recoil detectionCavity magnetronNitrogenComposite materialMetallurgyNanotechnologyOpticsChemistryPhysicsOrganic chemistryChromatographyQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices