Structural regulation and polishing performance of dendritic mesoporous silica (D-mSiO2) supported with samarium-doped cerium oxide composites
Yang Chen, Menghan Wang, Wenjie Cai, Tianyu Wang, Ailian Chen
Topics & Concepts
Materials scienceSamariumCerium oxideChemical-mechanical planarizationPolishingChemical engineeringDopingOxideMesoporous materialMesoporous silicaDopantLanthanideCeriumComposite numberComposite materialInorganic chemistryIonMetallurgyCatalysisChemistryOrganic chemistryOptoelectronicsEngineeringDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesAdvanced materials and composites