Effective encapsulation of ZnO thin film transistors controlled by thermal energy
Xue Chen, Jiaxian Wan, Hao Wu, Chang Liu
Topics & Concepts
PassivationMaterials scienceThreshold voltageThin-film transistorTransistorOptoelectronicsThermal stabilityOxideOxygenAtomic layer depositionThin filmLayer (electronics)Chemical engineeringNanotechnologyVoltageMetallurgyChemistryElectrical engineeringEngineeringOrganic chemistryThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices