High-performance FBAR humidity sensor based on the PI film as the multifunctional layer
Jihang Liu, Zhan Zhao, Zhen Fang, Zhenyu Liu, Yusi Zhu, Lidong Du
Topics & Concepts
Materials scienceRepeatabilityHumidityFabricationResonatorSensitivity (control systems)ReproducibilityOptoelectronicsFinite element methodComposite materialAcousticsElectronic engineeringStructural engineeringThermodynamicsPathologyChromatographyPhysicsMathematicsChemistryAlternative medicineMedicineEngineeringStatisticsAnalytical Chemistry and SensorsGas Sensing Nanomaterials and SensorsAcoustic Wave Resonator Technologies