Nanoindentation Characterization of Single-Crystal Silicon with Oxide Film
Lianmin Yin, Yifan Dai, Hao Hu
Topics & Concepts
NanoindentationMaterials scienceSiliconSingle crystalComposite materialDeformation (meteorology)Silicon oxideCrystal (programming language)Monocrystalline siliconCrystallographyMetallurgySilicon nitrideComputer scienceProgramming languageChemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications