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Effects of RF Magnetron Sputtering Deposition Power on Crystallinity and Thermoelectric Properties of Antimony Telluride and Bismuth Telluride Thin Films on Flexible Substrates

Farbod Amirghasemi, Sam Kassegne

2021Journal of Electronic Materials19 citationsDOI

Topics & Concepts

Materials scienceBismuth tellurideThin filmSputter depositionThermoelectric effectOptoelectronicsSeebeck coefficientWaferSubstrate (aquarium)Thermoelectric materialsSputteringSiliconSurface roughnessComposite materialNanotechnologyThermal conductivityPhysicsOceanographyThermodynamicsGeologyAdvanced Thermoelectric Materials and DevicesThermal Radiation and Cooling TechnologiesThermal properties of materials
Effects of RF Magnetron Sputtering Deposition Power on Crystallinity and Thermoelectric Properties of Antimony Telluride and Bismuth Telluride Thin Films on Flexible Substrates | Litcius