On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle
Hao-Chien Cheng, Shi-Chi Liu, Chih-Chen Hsu, Hung‐Yu Lin, Fuchi Shih, Mingching Wu, Kai-Chih Liang, Mei‐Feng Lai, Weileun Fang
Topics & Concepts
ScannerOpticsMicroelectromechanical systemsCantileverMaterials scienceWaferPiezoelectricitySilicon on insulatorAcceptance angleActuatorOptoelectronicsElectrical engineeringSiliconEngineeringPhysicsComposite materialAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsPhotonic and Optical Devices