Numerical framework for multi-scale modeling planar DC magnetron sputtering
Si Bui Quang Tran, Fong Yew Leong, H. Ramanarayan, Ding Wenjun, Po-Yen Lai, Duc Vinh Le
Topics & Concepts
SputteringSputter depositionMaterials scienceArgonComputational physicsAnalytical Chemistry (journal)ChemistryThin filmThermodynamicsAtomic physicsPhysicsNanotechnologyChromatographyMetal and Thin Film MechanicsFusion materials and technologiesPlasma Diagnostics and Applications