Litcius/Paper detail

Enhancing the effectiveness of output projection in wafer fabrication using an Industry 4.0 and XAI approach

Toly Chen, Yu-Cheng Wang, Chi‐Wei Lin

2024The International Journal of Advanced Manufacturing Technology12 citationsDOI

Topics & Concepts

WaferFabricationWafer fabricationProjection (relational algebra)Computer scienceManufacturing engineeringEngineeringMaterials scienceOptoelectronicsAlgorithmPathologyMedicineAlternative medicineManufacturing Process and OptimizationIndustrial Vision Systems and Defect DetectionDigital Transformation in Industry
Enhancing the effectiveness of output projection in wafer fabrication using an Industry 4.0 and XAI approach | Litcius