Fabrication of 8-inch N-type 4H-SiC Single Crystal Substrate with Low Dislocation Density
Xixi Xiong, Xianglong YANG, Xiufang Chen, X.X. Li, Xuejian Xie, Guojie HU, Yan Peng, Guojian Yu, Xiaobo Hu, Y. B. Wang, Xiangang Xu
Abstract
低位错密度 8 英寸导电型碳化硅单晶衬底制备
Topics & Concepts
Materials scienceFabricationDislocationSubstrate (aquarium)CrystallographySingle crystalOptoelectronicsNanotechnologyComposite materialChemistryMedicineAlternative medicinePathologyOceanographyGeologySilicon Carbide Semiconductor TechnologiesAdvanced ceramic materials synthesisAluminum Alloys Composites Properties