Magnetron co-sputtering optimized aluminum-doped zinc oxide (AZO) film for high-response formaldehyde sensing
Ming Zhang, Yankun Tang, Xin Tian, Hairong Wang, Jiuhong Wang, Qunming Zhang
Topics & Concepts
FormaldehydeSputteringSputter depositionZincMaterials scienceThin filmCarbon monoxideInorganic chemistryBenzeneChemistryCatalysisOrganic chemistryNanotechnologyMetallurgyGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors