Study on the mechanism of ultrasonic-assisted water confined laser micromachining of silicon
Jia Zhou, Rongwei Xu, Hui Jiao, Jiading Bao, Qingyuan Liu, Yuhong Long
Topics & Concepts
Materials scienceSurface micromachiningUltrasonic sensorLaserMachiningParticle image velocimetryLaser power scalingAcoustic streamingLaser ablationWater flowAblationOpticsSiliconOptoelectronicsAcousticsFabricationMechanicsMedicineTurbulenceAlternative medicineMetallurgyEngineeringPhysicsEnvironmental engineeringAerospace engineeringPathologyLaser Material Processing TechniquesOcular and Laser Science ResearchAdvanced Surface Polishing Techniques