Nanoscale imaging of mobile carriers and trapped charges in delta doped silicon p–n junctions
Georg Gramse, Alexander Kölker, Tomáš Škereň, Taylor J. Z. Stock, G. Aeppli, Ferry Kienberger, Andreas Fuhrer, Neil J. Curson
Topics & Concepts
DopantMaterials scienceSiliconOptoelectronicsDopingElectrostatic force microscopeCharge carrierNanotechnologyAtomic force microscopyForce Microscopy Techniques and ApplicationsNanowire Synthesis and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis