Uniform deposition of silicon oxide film on cylindrical substrate by radially arranged plasma jet array
Ruixue Wang, Zhangchuan Xia, Xianghao Kong, Shuang Xue, Huiyan Wang
Topics & Concepts
Materials scienceSubstrate (aquarium)SiliconPlasmaDeposition (geology)Silicon oxideComposite materialOptoelectronicsOceanographyQuantum mechanicsBiologyPaleontologyGeologyPhysicsSedimentSilicon nitrideZnO doping and propertiesPlasma Diagnostics and ApplicationsSurface Modification and Superhydrophobicity