Underwater laser micromachining of silicon in pressurized environment
Wisan Charee, Huan Qi, Viboon Saetang
Topics & Concepts
Materials scienceSurface micromachiningLaserSiliconWaferUnderwaterGroove (engineering)AblationLaser ablationOpticsLaser power scalingLaser beam qualityOptoelectronicsMetallurgyLaser beamsFabricationAlternative medicineMedicineAerospace engineeringOceanographyPhysicsGeologyEngineeringPathologyLaser Material Processing TechniquesOcular and Laser Science ResearchLaser-induced spectroscopy and plasma