Study on plasma characteristics and gas analysis before and after recovery using liquid-fluorocarbon precursor
Jun‐Young Park, Byoungmoon Oh, Kyongnam Kim, Dain Sung, G.Y. Yeom
Topics & Concepts
Etching (microfabrication)PlasmaFluorocarbonPlasma etchingMaterials scienceAnalytical Chemistry (journal)SemiconductorReactive-ion etchingGas compositionChemistryLayer (electronics)Chemical engineeringOptoelectronicsNanotechnologyChromatographyComposite materialPhysicsEngineeringQuantum mechanicsThermodynamicsPlasma Diagnostics and ApplicationsCopper Interconnects and ReliabilityZnO doping and properties