Low-temperature crystallization and paraelectric–ferroelectric phase transformation in nanoscale ZrO<sub>2</sub> thin films induced by atomic layer plasma treatment
Sheng‐Han Yi, K.T. Huang, Hsin-Chih Lin, Miin‐Jang Chen
Abstract
Crystallization and ferroelectricity with high endurance are achieved in ZrO<sub>2</sub> thin films at low temperature using an atomic layer plasma treatment technique.
Topics & Concepts
Materials scienceFerroelectricityCrystallizationDielectricThin filmPlasmaLayer (electronics)Nanoscopic scalePhase (matter)Condensed matter physicsChemical engineeringNanotechnologyOptoelectronicsPhysicsOrganic chemistryQuantum mechanicsEngineeringChemistryFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesFerroelectric and Piezoelectric Materials