Synergistic effect of LABSA/JFCE combined surfactant system on the removal of particles on copper wafer surface
Da Yin, Siyu Tian, Nannan Zhang, Qi Wang, Xiaoqin Sun, Mengrui Liu, Shihao Zhang, Baimei Tan
Topics & Concepts
CopperPulmonary surfactantAdsorptionChemical-mechanical planarizationScanning electron microscopeChemical engineeringParticle (ecology)Composite numberWaferChemistryMaterials scienceParticle sizeFatty alcoholPolishingComposite materialMetallurgyOrganic chemistryNanotechnologyPhysical chemistryGeologyEngineeringOceanographyAdvanced Surface Polishing TechniquesMinerals Flotation and Separation TechniquesForce Microscopy Techniques and Applications