CMOS-compatible reconstructive spectrometers with self-referencing integrated Fabry–Perot resonators
Chunyu You, Xing Li, Yuhang Hu, Ningge Huang, Yang Wang, Binmin Wu, Guobang Jiang, Jiayuan Huang, Ziyu Zhang, Bingxin Chen, Yue Wu, Junhan Liu, Xiangzhong Chen, Enming Song, Jizhai Cui, Peng Zhou, Zengfeng Di, Zhenghua An, Gaoshan Huang, Yongfeng Mei
Abstract
Miniaturized reconstructive spectrometers play a pivotal role in on-chip and portable devices, offering high-resolution spectral measurement through precalibrated spectral responses and AI-driven reconstruction. However, two key challenges persist for practical applications: artificial intervention in algorithm parameters and compatibility with complementary metal-oxide-semiconductor (CMOS) manufacturing. We present a cutting-edge miniaturized reconstructive spectrometer that incorporates a self-adaptive algorithm referenced with Fabry-Perot resonators, delivering precise spectral tests across the visible range. The spectrometers are fabricated with CMOS technology at the wafer scale, achieving a resolution of ~2.5 nm, an average wavelength deviation of ~0.27 nm, and a resolution-to-bandwidth ratio of ~0.46%. Our approach provides a path toward versatile and robust reconstructive miniaturized spectrometers and facilitates their commercialization.