Regulation of electronic properties of ZnO/In<sub>2</sub>O<sub>3</sub>heterospheres<i>via</i>atomic layer deposition for high performance NO<sub>2</sub>detection
Zishuo Li, Chengming Lou, Guanglu Lei, Guocai Lu, Hongyin Pan, Xianghong Liu, Jun Zhang
Abstract
Heterogeneous In<sub>2</sub>O<sub>3</sub>/ZnO spheres designed by atomic layer deposition manifest high response to NO<sub>2</sub>detection.
Topics & Concepts
Atomic layer depositionDeposition (geology)Layer (electronics)Materials scienceNanotechnologyOptoelectronicsGeologySedimentPaleontologyGas Sensing Nanomaterials and SensorsZnO doping and propertiesAnalytical Chemistry and Sensors