Demolding force dependence on mold surface modifications in UV nanoimprint lithography
Mingjie Li, Yulong Chen, Wenxin Luo, Xing Cheng
Topics & Concepts
MoldMaterials scienceNanoimprint lithographyComposite materialAdhesionLayer (electronics)Surface roughnessCoatingResistSurface finishNanotechnologySurface forceStress (linguistics)FabricationPhysicsMedicineAlternative medicineMechanicsPathologyPhilosophyLinguisticsNanofabrication and Lithography TechniquesAdvancements in Photolithography TechniquesForce Microscopy Techniques and Applications