Unexpected phosphorus doping routine of planar silicon nanowires for integrating CMOS logics
Ying Sun, Wentao Qian, Shuaishuai Liu, Taige Dong, Junzhuan Wang, Jun Xu, Kunji Chen, Linwei Yu
Abstract
. Finally, true CMOS inverters are successfully demonstrated based on the closely-packed SiNW channels of distinct doping polarities, indicating a new convenient and highly efficient doping routine to construct more advanced SiNW logics and sensors.
Topics & Concepts
DopingMaterials sciencePlanarCMOSSiliconSilicon nanowiresNanowireNanotechnologyOptoelectronicsComputer scienceComputer graphics (images)Semiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignNanowire Synthesis and Applications