Improvement mechanism of brittle-plastic transition and residual stress in scratching 4H–SiC implanted by hydrogen ions
Qiang Kang, Xudong Fang, Chen Wu, Hao Sun, Ziyan Fang, Bian Tian, Libo Zhao, Songli Wang, Nan Zhu, Prateek Verma, Ryutaro Maeda, Zhuangde Jiang
Topics & Concepts
Materials scienceMachiningIon implantationComposite materialMicroscale chemistryResidual stressScratchAcoustic emissionWaferRaman spectroscopyBrittlenessFracture (geology)IonOptoelectronicsOpticsMetallurgyMathematics educationMathematicsPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisDiamond and Carbon-based Materials Research